Projects

🚧 Under Construction

KoSi Project – Measurement Methods for Deep Silicon Structures

12/21/2024 • Research, Semiconductor, Measurement, 3D Integration, TSV, Optics

Development of optical measurement systems for characterization of deep silicon structures in 3D chip integration, focusing on Through-Silicon Vias (TSVs).

OTSW Integration in CMOS Flows

12/20/2024 • OTSW, DRIE, Silicon Photonics

First monolithic integration of air-clad OTSWs in standard silicon using Bosch and cryogenic DRIE.

Simulation Suite for Waveguides

7/10/2024 • Simulations, Silicon Photonics

COMSOL and RSoft simulations for waveguide design.